TSMC: Immersion lithography nearly production ready

04:55 - Friday 24 February 2006 by From the Web
Source: Tom's Hardware – Keywords: tsmc, immersion, lithography Category : Miscellaneous

Taiwan Semiconductor Manufacturing Company (TSMC) revealed that its immersion lithography program has produced test wafers well within acceptable parameters for volume manufacturing, according to a company press release. TSMC’s immersion lithography technology is targeted at TSMC’s 45nm manufacturing process.

More here at DigiTimes.


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