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TSMC: Immersion lithography nearly production ready

By - Source: Tom's Hardware | B 0 comment

Taiwan Semiconductor Manufacturing Company (TSMC) revealed that its immersion lithography program has produced test wafers well within acceptable parameters for volume manufacturing, according to a company press release. TSMC’s immersion lithography technology is targeted at TSMC’s 45nm manufacturing process.

More here at DigiTimes.

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